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Dynamic characterization of a MEMS membrane resonator

MEMS devices are typically made up of components less than a few hundred microns in size. These dimensions can make it difficult to access electrical contacts or other components on a MEMS device.

This experiment demonstrates the use of two miBot micromanipulators for the positioning of tungsten probes in order to provide an actuation signal to an electrothermal MEMS resonator. The silicon membrane of the MEMS device is to be characterized with Digital Holographic Microscopy (DHM) to determine its resonant frequencies and image its deformation.

Also pictured from the same experiment, is a miBot probe being used to mechanically deform the silicon membrane of the MEMS resonator, which was performed without having to alter the sample or setup in any way.

Made in collaboration with

Lyncée Tec SA, Lausanne, Switzerland

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