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MEMS / NEMS mechanical testing

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Reliability and fatigue tests need to be carried out on new MEMS / NEMS devices to validate motions of new designs. In situ tests in SEM or under optical microscope are often preferred during the R&D phase so that abnormalities or defects can be rapidly detected. This video features a miBot used to deform an AFM cantilever while it is observed at the SEM.

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