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MEMS / NEMS mechanical testing

Products used in this application

Reliability and fatigue tests need to be carried out on new MEMS / NEMS devices to validate motions of new designs. In situ tests in SEM or under optical microscope are often preferred during the R&D phase so that abnormalities or defects can be rapidly detected. This video features a miBot used to deform an AFM cantilever while it is observed at the SEM.

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Imina Technologies' application engineer shows a colleague how to land probes on nanoscale contacts for in-situ SEM transistor characterization.