Transistor nodes size has kept decreasing down to a few tenths of nanometers. This makes the characterization of a single transistor impossible to carry out under a conventional probe station.
This application note reports on the characterization of PMOS field-effect transistors inside the SEM by means of nanoprobers. Imina Technologies Nanoprobing SEM solution loaded with four miBot™ nanomanipulators enables the investigator to precisely put down probes directly on metal lines. Electrical measurements are performed with a Keithley 4200-SCS semiconductor parameter analyzer.
The unique mobile motion technology of the micro-robots allows the operator to adjust the probe orientation in real-time to adjust to the geometry of the device under test. This avoids to have to open the microscope vacuum chamber, significantly accelerating the process throughput.