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Multi-channel EBIC on 7nm technology node: revealing hidden signals

We continue exploring the capabilities of our recently released advanced Electrical Failure Analysis (EFA) system. This setup allows both EFA beginners and seasoned users to get the most of their EBIC, EBAC, or EBIRCh experiments while enjoying a simplified workflow.

This system features separate channels for each probe, with additional in-situ amplifier from point electronic with a calibrated gauge for each channel.

What it means in practical terms is that we can quantify and assign separate colors to the signal collected by each probe. Alternatively, we can color-code the signal by the current direction. Calibrated gauge and quantitative signal collection mean that we can not only add signals but also subtract them.

The result of such so-called image math is that we can uncover otherwise hidden sources of contrast, enhancing our understanding of what happens with the sample.

For less experienced users, our advanced setup offers not only assistance at each step of the experiment, but also a very intuitive way to understand the collected data, and therefore a much shorter learning curve.

Experiment realized in partnership with

Point Electronic GmbH

References

Advances in EFA with Color Coded Multi-Channel Nanoprobing, Paper No: istfa2023p0427, pp. 427- 431; 5 pages, Grigore Moldovan; William Courbat; Jörg Jatzkowski

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