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Thermal stage for temperature-dependent nanoprobing

Electrical behavior of any materials and devices changes with temperature. To design reliable solutions, it is important to understand these changes. Reaching the relevant temperature range is sometimes a big challenge.

The accessory thermal stage for the Nanoprobing Solutions from Imina Technologies operates in the range from -25°C to 150°C with excellent thermal stability of <0.05°C. Thanks to Peltier elements used for cooling and heating, no water or nitrogen cooling is necessary, which reduces the system footprint and improves mechanical stability of the measurements. It takes just a few minutes to reach the target temperature, as can be seen from the plots.

The radiator of the thermal stage can be easily bent to fit into small SEM chambers. The diameter of the unfolded radiator and of the nanoprobing platform is 240 mm and 125 mm respectively. The total height of the system is 23 mm, and the weight 450 g (without cables).

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Imina Technologies' application engineer shows a colleague how to land probes on nanoscale contacts for in-situ SEM transistor characterization.