10 nm technology CMOS characterized with SEM-based miBot™ nanoprobers

The versatile nanoprobing solutions from Imina Technologies were successfully used to characterize CMOS transistors of commercial microprocessors with technology nodes 22, 14, and 10 nm. Results were reported in a new application note also available for download:

• SEM-Based Nanoprobing for the Characterization of NMOS and PMOS Transistors on 22, 14 and 10 nm Semiconductor Devices

The unique motion technology of the miBot™ nanoprobers as well as their compact design proved to be advantageous to intuitively position the probes and maintain stable electrical contacts with the transistor nodes.

Precisio™ software was used to assist the operator during the entire nanoprobing workflow, from positioning the probes to remotely controlling the semiconductor parameter analyzer and acquire the characteristic I-V curves of the MOSFETs.