The latest Precisio™ software release introduces several new features and improvements to the SEM and Electrical Analysis module, including a redesigned user interface that puts the most-used SEM functions right at your fingertips.
A key highlight is the ability to visualize multiple channels simultaneously with live, synchronized imaging of multi-channel EFA signals. This capability builds upon the image post-processing features described in our ISTFA article Advances in EFA with Color Coded Multi-Channel Nanoprobing which demonstrated how mixing color-coded signals from multiple channels improves visualization of overlapping structures and fields in emerging device technologies.
👉 Download the technical paper: In-situ Preamplifiers: Unlocking Advanced EFA for Next-Generation Semiconductor Devices
With the new Precisio™ Advanced EFA software, mixing EFA signal images can now be performed in real-time, providing essential context for failure analysis engineers during interpretation.
👉 Learn about the EFA solutions: www.imina.ch/EFA
In this video, you'll see how the advanced EFA module of Precisio™ software helps you:
- Visualize all channels simultaneously with live, synchronized imaging.
- Accelerate defect localization through color-coding and selective source mixing.
- Ensure reproducibility of results and quantitative electrical analysis by saving SEM and EFA image acquisition parameters.
This work has received funding from the Swiss State Secretariat for Education, Research and Innovation (SERI), and by the Innosuisse – Swiss Innovation Agency, in the context of 14AMI, a CHIPS Joint Undertaking project supported by the European Union (Grant agreement ID: 101111948).