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Detect sub-100 nm in-plane MEMS motion in-situ SEM

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Detecting in-plane movements in electrically actuated microelectromechanical systems (MEMS) can be a challenge, especially if the motion range is in nanometer range, or high in frequency. Low contrast with respect to the background can further complicate the detection. Overcoming these limitations usually requires complex experimental setups or additional fabrication steps.

A team led by Prof. Mervi Paulasto-Kröckel from Aalto University has shown that SEM imaging can be used to accurately detect in-plane movements with a resolution of a few nanometers. In recently published work, researchers show accurate motion detection below 100 nm in amplitude and up to 320 kHz in frequency.

Imina Technologies SA nanoprobing solution was used in this study to actuate the MEMS samples.

Congratulations to Tarmo Nieminen, Nikhilendu Tiwary, Glenn Ross and Mervi Paulasto-Kröckel on their impressive work!


Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

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