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Electrical characterization and EFA (EBIC and EBAC) used to detect and locate failures in semiconductor devices.
Electron Failure Analysis Probing Electronics

EBIC / EBAC techniques for semiconductor failure analysis

Five miBot nano probers landed on 100 nm flash memory bits contacts to find a failing bit and to understand its malfunction.
Electron Failure Analysis Probing Electronics

Nanoprobing on a faulty memory bit

Electron Failure Analysis Electronics

Identifying origins of EBIRCh contrast

59 nm failing spot in a leaky 130 tech node transistor detected using Electron Beam Induced Resistance Change (EBIRCh).
Electron Failure Analysis Probing Electronics

Defect localization at transistor gate using EBIRCh

Electron Probing Electronics Materials Science

Combined AFM and nanoprobing

Precise circuit editing: deposition of 1 kOhm pull-up resistor by a FIB using in-situ nano probing on a tilted stage
Electron Failure Analysis Probing Electronics

Circuit editing for IC debug

EBIC signal on AIGaN/GaN HEMT used to understand issues with threshold voltage, non-uniformity, damaged p-n junctions.
Electron Failure Analysis Probing Electronics Materials Science

EFA of high electron mobility transistors

In-situ SEM EBIC characterization of p-n junctions in a semiconductor chip cross-section.
Electron Failure Analysis Probing Electronics

Cross-section EBIC of a transistor array

Nano probers and a nanoindentor in contact with a metal line inside an SEM to measure transport change upon indentation.
Electron Probing Materials Science

Nanoindentation combined with nanoprobing

Nanomanipulation of individual nanowires using electrostatic forces in-situ SEM
Electron Manipulation Materials Science

In situ nanomanipulation in SEM

Electrical characterization of 22 nm, 14 nm and 10 nm technology node NMOS and PMOS transistors on the M0 layer.
Electron Failure Analysis Probing Electronics

Electrical nanoprobing on 22, 14, and 10 nm devices

Manipulation of a single Gd-doped ceria (MIEC) nanofiber inside SEM to prepare for TEM electrochemical measurements.
Electron Manipulation Materials Science

Manipulation of MIEC nanofibers

Semi-automated robotic manipulation of micron-scale biological samples with end-effectors under an optical microscope.
Optical Manipulation Materials Science

Robots cooperation for microparticles manipulation

Nanometer-scale manipulations on nanowires with nanoprobers in a SEM and a TEM.
Electron Manipulation Materials Science

TEM sample preparation

Precise positioning of an optical fiber to measure the spectral characteristics of a light-emitting diode.
Optical Manipulation Photonics

Fiber optic positionning

An SEM image of nanoprobes on a defective MOSFET device to measure fF gate capacitance-voltage characteristic.
Electron Failure Analysis Probing

Femtofarad capacitance-voltage measurement

miBots used to turn on a microLED sample under an optical microscope.
Optical Probing Electronics

MicroLED electrical testing

Heating and cooling stage for in-situ SEM nano probing to study semiconductor devices temperature-dependent behavior
Electron Failure Analysis Probing Materials Science

Thermal stage for temperature-dependent nanoprobing

Hexagonal array of self-assembled soot nanoparticles grown on a carbon microtube surface characterized by nanoprobing.
Electron Failure Analysis Probing Materials Science

Field-emitting properties of carbon micropyramids

Observation under a SEM to monitor the deformation of an AFM cantiveler. A miBot is employed to deform the AFM.
Electron Manipulation Electronics

MEMS / NEMS mechanical testing

IV curves for 180 nm tech node PMOS transistor at temperatures of -30, 75, 150°C reached by a heating and cooling stage.
Electron Failure Analysis Probing Electronics Materials Science

Thermal behavior of a PMOS transistor

Nanoprober tip pushinga a sub-200 nm-diameter, 50-micrometer-long single-crystal silicon nanowire resonator to fracture.
Electron Manipulation Probing Electronics

Characterization of SiNW based NEMS resonator

Ohmic contacts on ZnO nanowire fabricated by e-beam lithography on individual wires prepositioned in-situ by nano probes.
Optical Manipulation Electronics Photonics

Nanowires micromanipulation

miBots holding a optical fiber to illuminate the solar cell locally and contacting it to measure the electrical response.
Optical Manipulation Probing Photonics

Photovoltaic characterization of PV solar cells

Microgrippers and microprobes move Barium Titanate microparticles with a diameter ranging from 10 to 30 micrometers.
Optical Manipulation Materials Science

Micro-particles manipulation and sorting

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Imina Technologies' application engineer shows a colleague how to land probes on nanoscale contacts for in-situ SEM transistor characterization.