High precision robots for microscopes

We offer high-precision robotic solutions to interact with and characterize samples down to the nanometer scale. Based on a unique motion technology, positioning probes with our robots and maintaining stable electrical contacts has never been so easy. The high modularity of our solutions provides considerable flexibility for deep integration with a variety of microscopy and test equipment, enabling efficient measurement workflows.


Characterize your samples. Easily.

Integrated circuits, wafers, MEMS, or nanowires, whatever the samples and the measurements, our solutions adapt and fasten the time to critical data to help you achieve your experimental goals.

Electrical Probing

Measure the electrical properties of semiconductor devices on the smallest technology nodes.

Failure Analysis

Localize defects at contact levels and metal lines and increase semiconductor chips reliability.


Isolate single particles, perform assemblies, or prepare samples for further investigations.

Experiment under any microscope.

Imina Technologies’ modular robotic platforms are designed to fit all kind of scanning electron microscopes and optical setups. Probing at MICRO and NANO scales becomes truly convenient.

NANO Product Line

In situ nanoprobing and electrical failure analysis solutions for your SEM, FIB or dual beam.

Visit the NANO product page

MICRO Product Line

Microprobing solutions for your optical microscope, probe station or inspection tool.

Visit the MICRO product page

Precisio™ Software

Precisio™ software is making the user experience truly intuitive. All required controls and parameters are embedded into a streamlined workflow with step by step operator assistance to perform your measurements in the most effective way. Features include:

  • Test recipes
  • Tips contact detection
  • Electrical measurements
  • Data management
  • Reporting
Learn more about Precisio™

Trusted by world's leading semiconductor companies and renowned research institutes around the globe.


Aug. 30, 2023

In-situ SEM measurement of thermal behavior of a PMOS transistor

Featuring our thermal stage.
Aug. 15, 2023

EBIC measurement of the minority carriers’ diffusion length in a GaAs solar cell p-n junction

Quantitative EBIC on GaAs solar cell p-n junction. Calibrated EBIC signal acquisition enables the measurement of minority carriers’ diffusion length.
Aug. 8, 2023

Origins of leakage currents in nanowire array solar cells

Solar cells based on radial-junction nanowires: how nanowire-to-nanowire inhomogenity affects their performance and how to improve it?


Exhibitions Sep. 25 to 28, 2023

MNE 2023

Berlin, Germany

Exhibitions Oct. 2 to 5, 2023

ESREF 2023

Toulouse, France

Exhibitions Nov. 12 to 16, 2023

ISTFA 2023

Phoenix, AZ, USA

International Sales and Customer Support

Our solutions are distributed worldwide through our network of qualified partners. We are here to support you! Get in touch with us, we are committed to assist you in selecting the products that best meets your needs.

Find a partner in your country