Microprobing solutions for optical microscope, probe station and inspection tool.
Precisely position probes and sensors and physically interact with your samples in even the most confined environments.
Microprobing solutions for optical microscope, probe station and inspection tool.
Precisely position probes and sensors and physically interact with your samples in even the most confined environments.
The MICRO product line has three different platforms specially designed to minimize their footprint in your laboratory. Available as stand-alone solutions including microscope and sample positioning stage, or as separate components for flexible integration with your own microscopy equipment, they accommodate up to 8 miBot™ microprobers, allowing one to independently position probes and sensors over millimeters with a resolution down to a few tenth of nanometers.
Upgrade your optical microscopy setup with highly precise and stable piezo-actuated manipulators. It is perfectly suited for use under optics at short working distance and is easily and quickly installed on setups like:
Perform electrical characterization of semiconductor dies and test devices at micron scale with an easy-to-use computer assisted probing system. This platform features all the components to drive up to 4 miBot robots and connect their probe tips to third party electrical source-measurement units. A high-magnification microscope with motorized zoom and a manual X-Y stage for sample positioning are part of this compact turnkey solution.
This solution is designed for demanding applications where sub-micron scale components need to be electrically characterized on wafers with some degree of automation. The platform features all the components to drive up to 8 miBot robots and connect their probe tips to third party electrical source-measurement units. A highly precise X-Y-Z wafer chuck (cooling/heating options available) and a powerful microscope with motorized zoom are part of this fully integrated solution.
We have a fully equipped demo lab for semiconductor electrical failure analysis. Our applications team is eager to perform live demonstrations and feasibility studies for you, onsite or online.
In the meantime, do not miss the opportunity to learn more about our products and applications with one of our webinars!