Microprobing solutions for optical microscope, probe station and inspection tool.

Precisely position probes and sensors and physically interact with your samples in even the most confined environments.

Micro Probe Station product sheet

Microprobing Solutions for Optical Microscopes

The MICRO product line has three different platforms specially designed to minimize their footprint in your laboratory. Available as stand-alone solutions including microscope and sample positioning stage, or as separate components for flexible integration with your own microscopy equipment, they accommodate up to 8 miBot™ microprobers, allowing one to independently position probes and sensors over millimeters with a resolution down to a few tenth of nanometers.

Seamless integration

Upgrade your optical microscopy setup with highly precise and stable piezo-actuated manipulators. It is perfectly suited for use under optics at short working distance and is easily and quickly installed on setups like:

  • Upright and inverted optical microscopes
  • Probe stations
  • Semiconductor inspection tools
  • Atomic force microscopes (AFM)
  • Glove boxes and environmental chambers

Micro probe station for small samples

Perform electrical characterization of semiconductor dies and test devices at micron scale with an easy-to-use computer assisted probing system. This platform features all the components to drive up to 4 miBot robots and connect their probe tips to third party electrical source-measurement units. A high-magnification microscope with motorized zoom and a manual X-Y stage for sample positioning are part of this compact turnkey solution.

Product sheet

Wafer-level probe station with motorized chuck

This solution is designed for demanding applications where sub-micron scale components need to be electrically characterized on wafers with some degree of automation. The platform features all the components to drive up to 8 miBot robots and connect their probe tips to third party electrical source-measurement units. A highly precise X-Y-Z wafer chuck (cooling/heating options available) and a powerful microscope with motorized zoom are part of this fully integrated solution.

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Control the experiment from a unified software suite

The platforms hardware components of the MICRO product line are parameterized and controlled from the user-friendly PrecisioTM software suite. It makes the system easy to start with and allows you to quickly perform electrical characterization of your samples at micron scale.

Discover PrecisioTM software

Need to probe in an electron microscope?

The NANO product line is what you are looking for. It features:

  • Nanoprobing platforms for up to 8 nanoprobers
  • Compatibility with stage mounted and load-lock vacuum chambers
  • A comprehensive set of options including EBIC/EBAC acquisition systems, large sample adapter, sample substage, etc.

Discover the NANO products line and optimize your investment by sharing components between a MICRO and NANO platform.

Featured Applications

Explore some typical applications that our industrial and academic customers regularly address with the MICRO product line.

Electrical microprobing
Perform electrical probing on small pads or lines without the need of wire bonding.

Materials characterization
Characterize the electrical properties of new materials on even the most fragile structures.

Handle your structures and precisely position them with an unmatched dexterity.

Because seeing is believing!

We have a fully equipped demo lab for semiconductor electrical failure analysis. Our applications team is eager to perform live demonstrations and feasibility studies for you, onsite or online.

Book your demo today!

In the meantime, do not miss the opportunity to learn more about our products and applications with one of our webinars!

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