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Advanced AFM with simultaneous electrical probing

Atomic Force Microscopy (AFM) combined with simultaneous electrical measurements opens access to complex analysis of various materials. This combination also enables in-situ measurements of operating or actuated devices.

In this application note, we show an integration of Imina Technologies’ miBot nano probers into Bruker Dimension Icon™ and Dimension Edge™ AFMs. We present Kelvin Probe Force Microscopy (KPFM) experiments to map the surface potential of various metallic structures and semiconductor devices in operating conditions.

Bruker Dimension Icon™ AFM has a tip holder with a large clearance, so miBots™ fit on the sample stage while leaving sufficient room for the AFM tip. With miBots’ compact design, it is easy and safe to land the probes on the sample close to the AFM tip. Thanks to Bruker Dimension Icon’s ‘scan-by-tip’ design, miBots can be integrated without compromising scanning quality and speed.

Electrical nanoprobing is compatible with different advanced characterization modes, such as Electric Field Microscopy (EFM), Kelvin Probe Force Microscopy (KPFM), Magnetic Force Microscopy (MFM), Piezoresponse Force Microscopy (PFM), Conductive-AFM, Tunneling-AFM (TUNA), Scanning Capacitance Microscopy (SCM), Scanning Spreading Resistance Microscopy (SSRM), Scanning Thermal Microscopy (SThM), to name a few.

Imina Technologies’ miBots can be added to existing Dimension Icon setups. They are easy to install, use, and can be integrated into other analytical tools (optical microscopes, etc).

Experiment realized in partnership with

Bruker Nano Surfaces & Metrology

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