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Electromechanical characterization of organic MEMS cantilevers

This application note reports about the electromechanical characterization of the enhanced sensitivity of organic piezoresistive microcantilevers developed at the IMS Laboratory of the Université de Bordeaux, France. Together with their electrical probing capabilities, the sub-micron positioning resolution and the high mechanical stability of the miBot micromanipulators were exploited to carry out the characterization procedure of these systems.

The characterization results assess the combination of CNT based nanocomposites integrated into organic microcantilevers to design highly sensitive, compact and low-cost strain MEMS sensors.

The ease-of-use of Imina Technologies micro-robots made it possible to quickly carry out several experimental runs in order to evaluate different mass-fraction of CNT/SU-8 nanocomposite and select the optimal design.

Experiment realized by

IMS, University of Bordeaux, Bordeaux, France

Reference

D. Thuau C. Ayela, P. Poulin, I. Dufour, Highly piezoresistive hybrid MEMS sensors, Sensors and Actuators A 209 (2014) 161–168.

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