All applications

Electromechanical characterization of organic MEMS cantilevers

Carbon nanotubes (CNT) can be incorporated into nanocomposite materials to produce compact and low-cost MEMS strain sensors with enhanced sensitivity.

Here, we show electromechanical characterization of organic piezoresistive microcantilevers using miBot manipulators.

The sensors were developed at the IMS Laboratory of the Université de Bordeaux, France. The ease-of-use of Imina Technologies micro-robots made it possible to quickly carry out several experimental runs to evaluate performance of different mass-fraction of CNT/SU-8 nanocomposite and select the optimal design.

Experiment realized by

IMS, University of Bordeaux, Bordeaux, France


D. Thuau C. Ayela, P. Poulin, I. Dufour, Highly piezoresistive hybrid MEMS sensors, Sensors and Actuators A 209 (2014) 161–168.

Because seeing is believing!

We have fully equipped demo lab for semiconductor electrical failure analysis. Our applications team is eager to perform live demonstrations and feasibility studies for you, onsite or online.

Book your demo today!

In the meantime, do not miss the opportunity to learn more about our products and applications with one of our webinars!

Register to a webinar

Imina Technologies' application engineer shows a colleague how to land probes on nanoscale contacts for in-situ SEM transistor characterization.